@Article{PillacaRamGutLugTra:2019:DLDeIn,
               author = "Pillaca, Elver Juan de Dios Mitma and Ram{\'{\i}}rez Ramos, 
                         Marco Antonio and Gutierrez Bernal, Jes{\'u}s Manuel and Lugo 
                         Gonz{\'a}lez, Dubrazkha Carolina and Trava-Airoldi, Vladimir 
                         Jesus",
          affiliation = "{Instituto Nacional de Pesquisas Espaciais (INPE)} and {Instituto 
                         Nacional de Pesquisas Espaciais (INPE)} and {Universidad Nacional 
                         de Colombia} and {Instituto Nacional de Pesquisas Espaciais 
                         (INPE)} and {Instituto Nacional de Pesquisas Espaciais (INPE)}",
                title = "DLC deposition inside of a long tube by using the pulsed-DC PECVD 
                         process",
              journal = "Surface and Coatings Technology",
                 year = "2019",
               volume = "359",
                pages = "55--61",
                month = "Feb.",
             keywords = "Electric discharge, DLC, PECVD, Coating inside of the tube, 
                         Temperature.",
             abstract = "In this study, the pulsed-DC PECVD deposition system was used to 
                         produce Diamond-like carbon (DLC) film on the internal surface of 
                         a long metal tube (200\ cm in length and 10\ cm in 
                         diameter) employed as the deposition chamber itself. Firstly, the 
                         features of plasma discharges and the temperature distribution 
                         along the tube external surface were studied using argon, silane, 
                         and acetylene. The experimental results demonstrate that a stable 
                         discharge can be established inside the tube. It was found that 
                         when the precursor gas is employed, a temperature gradient on the 
                         tube surface is formed. Secondly, PECVD experiments regarding DLC 
                         film deposition inside the inner surface of the tube are 
                         described. For this purpose, polished stainless steel and silicon 
                         wafer samples were mounted on the inside tube surface for 
                         subsequent analysis of the coatings. It was found that the growth 
                         rate and the structure properties of the DLC film varied along the 
                         axial direction of the tube. However, surfaces of DLC film with 
                         high sp3 content provided better tribological characteristics. 
                         These results were mainly attributed to complex processes of local 
                         dissociation and activation happened by collision between the 
                         electrons and neutrals.",
                  doi = "10.1016/j.surfcoat.2018.12.011",
                  url = "http://dx.doi.org/10.1016/j.surfcoat.2018.12.011",
                 issn = "0257-8972",
             language = "en",
           targetfile = "pillaca_dlc.pdf",
        urlaccessdate = "27 abr. 2024"
}